SPTS ESC Refurbishment

Electrostatic Chuck (ESC)

Used in vacuum environments, the ESC is a core and critical component in IC manufacturing equipment, serving several key functions:

• Adsorbing and supporting wafers  
• Controlling wafer surface temperature  
• Acting as part of the RF system  

ESCs can be categorized into two types based on electrode design:

• Single-electrode: a single electrode covering the entire electrostatic chuck surface  
• Dual-electrode: utilizing electric fields generated by positive and negative voltages to adsorb wafers  

Compared to single-electrode designs, dual-electrode ESCs offer higher adhesion force and more uniform electric field strength, enabling tight and even wafer attachment.