Electrostatic Chuck (ESC)

Used in vacuum environments, the ESC is a core and critical component in IC manufacturing equipment, serving several key functions:

• Adsorbing and supporting wafers  
• Controlling wafer surface temperature  
• Acting as part of the RF system

Polymer electrostatic chucks are the most widely used, with the most mature manufacturing process. After special modification, their electrical, mechanical, temperature resistance, and halogen resistance properties are significantly enhanced, forming a dense dielectric insulation layer between internal electrodes. Polyimide electrostatic chucks meet cleanroom dust-free requirements and possess self-cleaning properties, leaving no marks or particle residues on adsorbed materials.