Ceramic Nozzle

Ceramic nozzles are critical fluid delivery consumables for etching, thin-film deposition and wet cleaning equipment. Main materials include high-purity alumina, aluminum nitride and silicon nitride. Adopting ultra-precision orifice machining and mirror polishing, the nozzles feature high micro-hole accuracy and smooth inner walls, ensuring stable and uniform delivery of process gas or liquid for controllable plasma and film performance. Ceramic boasts outstanding plasma corrosion resistance, high-temperature stability and electrical insulation without metal ion leaching, effectively reducing particle contamination inside chambers. Customization of various specifications is available for multi-category & low-volume orders. All parts go through semiconductor-grade cleaning and full dimensional inspection. With mature precision machining capability, we rapidly complete sample development and verification, deliver high-quality ceramic nozzles consistently, improve process stability and cut spare part replacement cost for customers.