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EMI Spiral Shield Gasket

  • Spiral tube electromagnetic shielding gaskets (commonly known as spiral tube EMI shields) are critical components for integrated electromagnetic shielding and sealing in precision electronic equipment such as semiconductor devices. Featuring a helical metal strip winding structure, they deliver high shielding effectiveness and environmental sealing, making them suitable for demanding conditions including high vacuum, strong RF fields, and extreme temperature variations.

    Shielding Performance: ≥90–100 dB across the 200 kHz to 10 GHz frequency range, meeting interference suppression requirements for RF systems in etching machines, PECVD equipment, and similar applications.

    Material Selection

    Metal Strip: Tin-plated beryllium copper (high elasticity, electrical conductivity of 20–60% IACS), or stainless steel (corrosion-resistant, ideal for preventing electrochemical corrosion in aluminum or stainless steel chambers).

    Core Material: Silicone rubber (temperature resistance -55°C to 200°C), or foamed silicone (low compression force), designed to withstand vacuum and thermal cycling environments typical in semiconductor equipment.

    Dimensions and Compression

    Outer Diameter: 1.0–9.9 mm (customizable in 0.1 mm increments), compatible with equipment groove dimensions.

    Compression Ratio: Recommended 15–30%. Composite core design prevents over-compression damage, extending service life.

    Environmental Compatibility: Temperature range -55°C to 200°C; resistant to plasma corrosion and low particle emission, compliant with semiconductor cleanroom standards.

    Customization and Process Control

    Customization Capability: Supports customization based on equipment groove dimensions and compression force requirements (standard, medium, low force), compatible with leading platforms such as AMAT, Lam, and TEL.

    Cleanroom Manufacturing: Full-process cleanroom production ensures surface particle count ≤5 particles/m² (≥0.5 μm) after cleaning, meeting Class 1 cleanroom standards for semiconductor manufacturing.

    Quality Assurance: 100% shielding performance testing, dimensional tolerance ±0.05 mm, and compression force consistency verification ensure batch-to-batch stability.

    Available Shielding Gasket Part Numbers:

    3320-01190  
    0190-43658  
    0190-41359  
    3320-01430  
    641-01428-000  
    1802-420160-11

Spiral tube electromagnetic shielding gaskets (commonly known as spiral tube EMI shields) are critical components for integrated electromagnetic shielding and sealing in precision electronic equipment such as semiconductor devices. Featuring a helical metal tape winding structure, they deliver high shielding effectiveness and environmental sealing, making them suitable for demanding conditions including high vacuum, strong radio frequency fields, and extreme temperature variations.
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