PPS Nozzle
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1. Product Overview
PPS nozzles are industrial fluid spray components made from polyphenylene sulfide (PPS) and precision-machined, specifically designed for applications such as semiconductor wafer cleaning, industrial spraying, and chemical solution delivery. With excellent high-temperature resistance, chemical corrosion resistance, and low leaching characteristics, it is suitable for demanding conditions involving high-temperature chemical solutions and easily crystallizing fluids, making it a critical consumable in semiconductor equipment wet processes and industrial fluid systems.II. Core Features and Advantages
1. Superior Thermal and Chemical Resistance
Long-term operating temperature tolerance reaches 200–220°C, with short-term capability to withstand even higher temperatures, ideal for applications involving heated fluids and high-temperature chemicals, preventing material softening or deformation.
It demonstrates exceptional stability against strong acids, strong alkalis, and organic solvents (such as acid/alkali cleaning solutions and photolithography chemicals commonly used in semiconductor processing), showing no swelling, decomposition, or release of harmful substances.
In high-temperature environments where fluids tend to crystallize, the material’s chemical inertness minimizes fluid adhesion and crystal buildup within flow channels, reducing clogging risks. Even minor crystalline deposits only cause surface discoloration without affecting nozzle spray performance or service life.2. Low Leaching and High Purity for Semiconductor Applications
Made from high-purity PPS raw materials, the product exhibits extremely low metal ion leaching, meeting Class 100 cleanroom standards for semiconductor manufacturing, preventing wafer surface contamination and ensuring process yield.
Its one-piece molded structure eliminates seams and burrs, with smooth internal channel walls that minimize fluid residue and crystal adhesion, significantly reducing particle contamination risks.3. Precision Molding Ensures Stable and Uniform Spray
Utilizing high-precision molding techniques, tight tolerances are maintained on channel and nozzle dimensions, ensuring consistent fluid flow rate, spray angle, and atomization quality.
Capable of adapting to various fluid pressure and flow requirements, it supports multiple spray patterns—including direct jet, fan spray, and mist—meeting diverse process needs such as wafer cleaning and uniform coating.4. High Strength and Long Service Life Reduce Maintenance Costs
The PPS material offers high mechanical strength, wear resistance, and impact resistance, capable of enduring prolonged fluid erosion and repeated use without cracking or damage.
Compared to metal nozzles, it avoids corrosion and rust; compared to conventional plastic nozzles, its thermal and chemical resistance exceeds threefold, reducing replacement frequency due to operational stress and lowering overall maintenance costs.III. Typical Application Scenarios
1. Semiconductor Wafer Cleaning Processes
Used as spray nozzles in wet cleaning equipment, compatible with high-temperature spraying of SC-1/SC-2 cleaning solutions and acid/alkali chemicals. Its low leaching ensures no wafer contamination and minimal particle residue.
Suitable for chemical delivery scenarios with crystallization risks; smooth internal channels reduce crystal buildup, while slight discoloration does not affect cleaning effectiveness.2. Industrial Fluids and Chemical Processing
Ideal for acid/alkali solution spraying and exhaust gas treatment scrubber towers, offering long-term corrosion and high-temperature resistance without degradation or blockage.
Used in plating and surface treatment processes, its strong chemical stability prevents chemical contamination that could lead to defective products.3. Other Industrial Applications
High-temperature disinfection spraying in food and pharmaceutical industries, component cleaning in electronics, chemical delivery in photovoltaic manufacturing, and other applications requiring high cleanliness, thermal stability, and corrosion resistance. -